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RF Power Supply Product
RF Power Supply Product

RF Power Supply Product

Starting in 2014, BBEF undertook the project of "R&D and industrialization of RF generator" which is a major national science and technology project, and began to enter the integrated circuit industry. At present, BBEF has made every effort to build a series of RF power supply products for semiconductor, flat panel display, solar photovoltaic, vacuum coating, medical equipment, plasma cleaning, ion implantation, etc.

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Product Series

支解线
  • 箭头2MHz 1.5kW/3kW/5kW/8kW RF power supply
  • 箭头13.56MHz 1.5kW/3kW/5.5kW/10kW matcher
  • 箭头13.56MHz 750W/1kW RF power supply

RF Power Supply Product

       Starting in 2014, BBEF undertook the project of "R&D and industrialization of RF generator" which is a major national science and technology project, and began to enter the integrated circuit industry. At present, BBEF has made every effort to build a series of RF power supply products for semiconductor, flat panel display, solar photovoltaic, vacuum coating, medical equipment, plasma cleaning, ion implantation, etc.